1. Physical Micromachining Technology
Laser Beam Machining: Njira yomwe imagwiritsa ntchito mphamvu yotenthetsera yowongoleredwa ndi laser kuti ichotse zinthu pazitsulo kapena zosapanga zitsulo, zoyenererana ndi zida zosamalidwa zokhala ndi magetsi otsika, koma zitha kugwiritsidwa ntchito pazinthu zambiri.
Kukonzekera kwa ion mtengo: njira yofunikira yopangira zinthu zosagwirizana ndi kupanga yaying'ono / nano.Amagwiritsa ntchito ma ion othamangitsidwa mchipinda chopanda mpweya kuchotsa, kuwonjezera kapena kusintha maatomu pamwamba pa chinthu.
2. Chemical micromachining luso
Reactive Ion Etching (RIE): ndi njira ya plasma yomwe zamoyo zimasangalatsidwa ndi kutulutsa pafupipafupi kwa wailesi kuti zikhazikitse gawo laling'ono kapena filimu yopyapyala muchipinda chocheperako.Ndi njira ya synergistic ya mitundu yogwira ntchito ndi ma ion amphamvu kwambiri.
Electrochemical Machining (ECM): Njira yochotsera zitsulo kudzera mu njira ya electrochemical.Amagwiritsidwa ntchito popanga makina ambiri azinthu zolimba kwambiri kapena zida zomwe zimakhala zovuta kuzipanga ndi njira wamba.Kugwiritsiridwa ntchito kwake kumangokhala ndi zipangizo zopangira.ECM imatha kudula ma angles ang'onoang'ono kapena ojambulidwa, ma contour ovuta kapena ma cavities muzitsulo zolimba komanso zosowa.
3. Makina opangira ma micromachining
Kutembenuka kwa Diamondi:Njira yotembenuza kapena kupanga zida zolondola pogwiritsa ntchito lathes kapena makina opangidwa okhala ndi malangizo achilengedwe kapena opangira diamondi.
Kugaya Diamondi:Njira yodulira yomwe ingagwiritsidwe ntchito kupanga magalasi a aspheric pogwiritsa ntchito chida chozungulira cha diamondi kudzera mu njira yodulira mphete.
Kupera Molondola:Njira yowonongeka yomwe imalola kuti zida zogwirira ntchito zitheke bwino komanso kulolerana pafupi kwambiri ndi kulolerana kwa 0.0001 ″.
Kupukutira:Njira yopukutira, kupukuta kwa mtengo wa argon ion ndi njira yokhazikika yomaliza magalasi a telescope ndikuwongolera zolakwika zotsalira kuchokera kumakina opukutidwa kapena ma optics otembenuzidwa ndi diamondi, njira ya MRF inali njira yoyamba yopukutira.Zogulitsa komanso zogwiritsidwa ntchito popanga magalasi a aspherical, magalasi, ndi zina.
3. Laser micromachining teknoloji, yamphamvu kuposa momwe mungaganizire
Mabowo awa pazogulitsa ali ndi mawonekedwe ang'onoang'ono, nambala yowundana, komanso kulondola kwapamwamba kwambiri.Ndi mphamvu zake zazikulu, mayendedwe abwino komanso kugwirizana, ukadaulo wa laser micromachining ukhoza kuyang'ana mtengo wa laser kukhala ma microns angapo m'mimba mwake kudzera munjira ina ya kuwala.Malo owala ali ndi kuchuluka kwamphamvu kwambiri kwa mphamvu.Zinthuzo zidzafika msanga posungunuka ndikusungunuka.Ndi kupitilira kwa laser, kusungunuka kumayamba kusungunuka, zomwe zimapangitsa kuti mpweya wabwino ukhale wosanjikiza, ndikupanga dziko lomwe nthunzi, cholimba ndi madzi zimakhalira.
Panthawi imeneyi, chifukwa cha mphamvu ya nthunzi ya nthunzi, kusungunula kumangoponyedwa kunja, kupanga maonekedwe oyambirira a dzenje.Pamene nthawi yowunikira ya mtengo wa laser ikuwonjezeka, kuya ndi m'mimba mwake kwa ma microspores kumapitilirabe kukula mpaka kuwala kwa laser kuthetsedwa, ndipo kusungunuka komwe sikunapopedweko kumalimbitsa kupanga recast wosanjikiza, kuti akwaniritse laser mtengo wosakonzedwa.
Ndi kuchuluka kwa kufunikira kwa micromachining ya zinthu zolondola kwambiri komanso zida zamakina pamsika, komanso kukula kwaukadaulo wa laser micromachining kukukulirakulira, ukadaulo wa laser micromachining umadalira pazabwino zake zotsogola, magwiridwe antchito apamwamba komanso zida zosinthika.Ubwino wa zoletsa zazing'ono, palibe kuwonongeka kwa thupi, ndi kuwongolera kwanzeru ndi kusinthasintha kudzagwiritsidwa ntchito kwambiri pokonza zinthu zolondola kwambiri komanso zapamwamba.
Nthawi yotumiza: Sep-26-2022